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  1. MultiCPM - Simultaneous Real Time Multi-Chamber - Multi diagnosis monitor

    The MULTISEM design concept is based on an open parallel architecture consisting of a central supervisor control unit, and a network of analytical substations
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    Jobin Yvon1
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    optical emission spectroscopy1
    dry etch1
    thin film characterisation1
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    plasma monitoring1
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    plasma characterization1
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    thin film monitors1
    Digitwin0
    plasma characterisation0

    www.multisem.com - 2009-02-13

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